• LAM 4400 6” & 8” Poly/Nitride Etch Systems
• LAM 4500 6” & 8” Oxide Etchers
• LAM 9400 6” Poly/Nitride Etch Systems
• LAM 9600 6” Metal Etch Systems
• TEL Unity II 6” Oxide Etchers
• Gasonics 3510 6” Asher
• Akron Gamma 6” Wetdeck-Nitride Strip

PHOTOLITHOGRAPHY:

• AMSL 5500/60 5X 6 & 8” Steppers
• AMSL 5500/200 5X 6” Steppers
• AMSL 5500/100 5X 6” Stepper
• Ultratech 1100 1X 8” Steppers
• TEL ACT 8 Coat/Develop Units
• FSI Polaris 2000 Coat/Develop Units
• Semiconductor Systems 150 & 1A Tracks

DEVELOPMENT-CVD:

• AMAT 5200 SACVD Dep
• AMAT P5000 BPTEOS Dep
• Novellus CI BPSG Dep

DIFFUSION:

• CFM 8100 Diffusion Pre-Clean Units
• Thermco 12K 4 Stack Horizontal Furnaces
• BTI Apogee Semitherm Vertical Furnaces
• Faith Rapitran II Mass Transfer Systems

IMPLANT:

• Axcelis VHE Hi Current Implanter
• Fusion 150 UV Cure Units

MISCELLANEOUS: 

• Zellwegger/Honeywell SYS 16 & CM4 MDA’s
• Cosmos PS7 Gas Detection Units
• Matheson Tri-Gas GSM5 Gas Cabinets
• Air Liquide Micro Purge P-21 Gas Cabinets
• Air Liquide EM5000 Inert Panels
• Matheson Tri-Gas AS6T Inert Panels
• Megatest Q262 Test Systems
• Electroglass EG2001 Test Systems
• Optical Scopes, Oscilloscopes, Meters, etc.